ADC 6022 Manuale Utente Pagina 1

Model FS 6022MEMS Mass Flow SensorsSIARGO MEMS FLOW SENSOR PRODUCTS© 2011 Siargo Ltd.VA.4

FeaturesModel FS6022MEMS Mass Flow SensorsDescriptionMass flow range: 0 ~ 250 SLPM, 0 ~ 300 SLPMFast response time: 8 ms typicalHighly sensitive in sm

MEMS Mass Flow Sensors The functional block diagram is shown in the following flow rate related voltage to ADC. The micro-controller figure. The cr

1. To obtain accurate flow measurement, let the sensor warm up 1 minute at power up. 2. For FS6022A, the analog output provides linearized voltage of

1.3 Flow Characteristics MEMS Mass Flow Sensors www.siargo.com F )

2. Electrical Interface2.1 Pin Definition2.2 Pin DescriptionThe FS6022 provides a 5-pin interface. The output connecting cable comes with t

MEMS Mass Flow Sensors www.siargo.com F )

MEMS Mass Flow Sensors www.siargo.com F )